NACHI-FUJIKOSHI Corp. 산업용로봇 SJ80C-18D/24D, SJ120C-28D/28S - Clean Room Robot
 모델명 |
SJ80C-18D/24D, SJ120C-28D/28S - Clean Room Robot |
| 카테고리 |
산업용로봇 |
| 제조사 |
NACHI-FUJIKOSHI Corp. |
| 기본사양 |
| Large-sized glass substrate transfer robot
- Perfect for horizontal transfer of 7th generation (SJ80C) through 9th generation (SJ120C) and other various-sized glass substrates.
Fastest motion in its class
- Rotation speed: Maximum 180°/sec
- Up and down speed: Maximum 1,050 mm/sec
Unique linkage structure applied to up and down axis
- High-rigidity structure for minimizing flexure and vibration
- Belt-less structure ensures high reliability and safety
Moving cables are completely enclosed in the arm
- The enclosed design prevents particle generation and looks good too
Controller
|
| 상세스펙 |
| Robot model |
SJ80C-18D-01 |
SJ80C-24D-01 |
| Air Cleanliness Class |
10 (0.3μm)*1 |
| Number of axes |
4 |
| Drive System |
AC Servo Drive |
| Maximum Stroke |
X1 |
Back &
Forth 1 |
3,670mm |
| X2 |
Back &
Forth 2 |
3,670mm |
| θ |
Rotation |
+2.53 to -3.40rad
(+145° to -195°) |
| Z |
Up &
Down |
1,800mm |
2,400mm |
| Maximum Velocity |
X1 |
Back &
Forth 1 |
3,000mm/sec |
| X2 |
Back &
Forth 2 |
3,000mm/sec |
| θ |
Rotation |
3.14rad/sec (180°/sec) |
| Z |
Up &
Down |
1,100mm/sec |
1,450mm/sec |
| Payload Weight |
80kg per arm (total 135kg) |
| Repeatability |
+/-0.3mm |
| Ambient Temperature |
0 to 35°C |
| Installation Conditions |
Floor Mount |
| Robot Body Weight |
1,175kg |
1,200kg |
*1 At flange surface on robot tip.
1rad=57.3° 1N=0.102kgf
| Robot model |
SJ120C-28D-01 |
SJ120C-28S-01 |
| Structure |
Articulated model
(vertical linkage type robot) |
| Air Cleanliness Class |
10 (0.3μm) *2 |
| Number of axes |
4 |
3 |
| Drive System |
AC Servo Drive |
| Maximum Stroke |
X1 |
Back &
Forth 1 |
4,480mm(+2,250 to -2,230mm) |
| X2 |
Back &
Forth 2 |
4,480mm
(+2,250 to -2,230mm) |
- |
| θ |
Rotation |
+3.40 to -2.53rad
(+195° to -145°) |
| Z |
Up &
Down |
2,800mm |
| Maximum Velocity |
X1 |
Back &
Forth 1 |
3,600mm/sec |
| X2 |
Back &
Forth 2 |
3,600mm/sec |
- |
| θ |
Rotation |
3.14rad/sec (180°/sec) |
| Z |
Up &
Down |
1,050mm/sec |
| Payload Weight |
X1 |
Back &
Forth 1 |
Max. 90kg |
Max. 120kg |
| X2 |
Back &
Forth 2 |
Max. 120kg |
- |
| Allowable moment |
X1 |
Back &
Forth 1 |
720N·m |
780N·m |
| X2 |
Back &
Forth 2 |
780N·m |
- |
Allowable moment
of intertia |
X1 |
Back &
Forth 1 |
135kg·m2 |
165kg·m2 |
| X2 |
Back &
Forth 2 |
165kg·m2 |
- |
| Repeatability |
+/-0.3mm |
+/-0.3mm |
| Ambient Temperature |
0 to 35°C |
| Installation Conditions |
Floor Mount |
| Robot Body Weight |
1,880kg |
1,680kg |
*2 At flange surface on robot tip.
1rad=57.3° 1N=0.102kgf
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